Micronit applies wet etching (HF etching) techniques to create channel structures in glass and silicon. HF is a hydrofluoric acid, commonly used for cleaning metal and etching glass. For the HF etching technique we use masks which make the absolute positioning of the structures accurate within one micrometer. By using a mask, the amount of channels, reservoirs, mixing and reaction chambers is irrelevant for the costs of the process.
Abrasive Jet Machining (powder blasting)
Abrasive Jet Machining (AJM) or powder blasting, is a technique in which a particle jet is directed towards a target for mechanical material removal. Powder blasting is a flexible, cost-effective and accurate technique to create fluidic channels and interconnections. With an accuracy of within 2 µm and a feature size accuracy of around 25µm. The exact layout of the holes and channels can be very flexible.
Shaped wells can be round, rectangular or triangular. The sides of the wells will not be completely vertical, but sloped at an angle of 70 degrees (tolerance depending on specifications). Furthermore, the average roughness of the channels will be between 0.8 and 2.5 µm, also depending on the chosen process.
After the powder blasting process, the substrate can be bonded to another glass or silicon substrate. As the surface of the powder blasted substrate remains undamaged.