Microstructuring of Glass

Microfluidic glass chips are developed by etching or powderblasting holes, cavities, microchannels and nanochannels in glass substrates. Micronit knows different micromachining technologies; click below to get more details of our processes.

 

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Powderblasting
Powderblasting is a flexible, cost-effective and accurate technique for making microfluidic channels and fluidic interfacing.

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HF Etching
Micronit applies HF etching (chemical etching) techniques to make channel structures in glass. Depths down to nanometer scale can be obtained.

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DRIE Etching
Deep Reactive Ion Etching is a unique technique to create deep, high density and high aspect ratio structures in fused silica or silicon substrates.